Publication:
Overbake: sub-40-nm gate patterning with ArF lithography and binary masks
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1922 since deposited on 2021-10-15
1last month
Acq. date: 2026-05-18
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Statistics
Views
1922 since deposited on 2021-10-15
1last month
Acq. date: 2026-05-18
Citations