Browsing by author "Vankerckhoven, Hans"
Now showing items 1-9 of 9
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Can we increase the efficiency of organic contamination removal by ozone/di-water processes by using additives
De Smedt, Frank; Vankerckhoven, Hans; De Gendt, Stefan; Heyns, Marc; Vinckier, Chris (2002) -
Determination of degradation products in O3/DI processes
Vankerckhoven, Hans; De Smedt, Frank; Van Herp, Bart; Claes, M.; De Gendt, Stefan; Heyns, Marc; Vinckier, Chris (2001) -
Determination of photoresist degradation products in O3/DI water processing
Vankerckhoven, Hans; De Smedt, Frank; Van Herp, Bart; Claes, Martine; De Gendt, Stefan; Heyns, Marc; Vinckier, Chris (2001) -
Photoresist stripping by Ozone/water processes: effect of additives
Vankerckhoven, Hans; De Smedt, Frank; Vandersmissen, Kevin; Claes, Martine; De Gendt, Stefan; Heyns, Marc; Vinckier, Chris (2005) -
Removal of photoresist by O3DI water processes: determination of degradation products
Vankerckhoven, Hans; De Smedt, Frank; Vinckier, Chris; Van Herp, Bart; Claes, M.; De Gendt, Stefan; Heyns, Marc (2001) -
Removal of photoresist by O3DI water processes: determination of degradation products
Vankerckhoven, Hans; De Smedt, Frank; Vinckier, Chris; Van Herp, Bart; Claes, Martine; De Gendt, Stefan; Heyns, Marc (2002) -
The increasing importance of the use of ozone in micro-electronics industry
De Smedt, Frank; De Gendt, Stefan; Claes, M.; Heyns, Marc; Vankerckhoven, Hans; Vinckier, Chris (2001) -
The removal of organic contamination by O3/DI water processes: a theoretical study
De Smedt, Frank; Vankerckhoven, Hans; Vinckier, Chris; De Gendt, Stefan; Claes, M.; Heyns, Marc (2001) -
The removal of organic contamination by O3/DI water processes: a theoretical study
De Smedt, Frank; Vankerckhoven, Hans; Vinckier, Chris; De Gendt, Stefan; Claes, Martine; Heyns, Marc (2002)