Authors

Vankerckhoven, Hans; De Smedt, Frank; Vandersmissen, Kevin; Claes, Martine; De Gendt, Stefan; Heyns, Marc; Vinckier, Chris

Conference

Ultra Clean Processing of Silicon Surfaces VII: Proceedings of the 7th International Symposium

Title

Photoresist stripping by Ozone/water processes: effect of additives

Publication type

Proceedings paper

Embargo date

9999-12-31