Publication:

Photoresist stripping by Ozone/water processes: effect of additives

Date

2005

Proceedings Paper

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Files

10484.pdf 222.18 KB

Author(s)

Vankerckhoven, Hans

;

De Smedt, Frank

;

Vandersmissen, Kevin

;

;

De Gendt, Stefan

;

;

Vinckier, Chris

Metrics

1857 since deposited on 2021-10-16

Acq. date: 2025-12-12