Browsing by author "Lubbers, A."
Now showing items 1-4 of 4
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Chemicals for the Chlorination of Gate Oxides
Mac Geary, M. J.; Boeglin, H. J.; Lubbers, A.; Mertens, Paul; Vermeire, Bert (1994) -
Chlorine precursors for gate oxidation processes
Mc Geary, M. J.; Mertens, Paul; Vermeire, Bert; Heyns, Marc; Sprey, Hessel; Lubbers, A.; Schaekers, Marc (1997) -
Effect of different chlorine sources during gate oxidation
Vermeire, Bert; Mertens, Paul; Mac Geary, M. J.; Kenis, Karine; Heyns, Marc; Schaekers, Marc; Lubbers, A. (1994) -
Just-Clean- Enough technology for the 21st century
Heyns, Marc; Meuris, Marc; Mertens, Paul; Hurd, Trace; Schmidt, Harald; Depas, Michel; Rotondaro, Antonio; Vermeire, Bert; Vandervorst, Wilfried; Storm, Wolfgang; Polleunis, C.; Bertrand, P.; McGeary, M. J.; Lubbers, A.; Hatcher, Z. (1995)