Chlorine precursors for gate oxidation processes

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Authors
Mc Geary, M. J.; Mertens, Paul; Vermeire, Bert; Heyns, Marc; Sprey, Hessel; Lubbers, A.; Schaekers, Marc
Conference
Environmental, Safety, and Health Issues in IC Production
Title
Chlorine precursors for gate oxidation processes
Publication type
Proceedings paper
Embargo date
9999-12-31
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