Publication:

Chlorine precursors for gate oxidation processes

Date

1997
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorMc Geary, M. J.
dc.contributor.authorMertens, Paul
dc.contributor.authorVermeire, Bert
dc.contributor.authorHeyns, Marc
dc.contributor.authorSprey, Hessel
dc.contributor.authorLubbers, A.
dc.contributor.authorSchaekers, Marc
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorSprey, Hessel
dc.contributor.imecauthorSchaekers, Marc
dc.date.accessioned2021-09-30T09:17:56Z
dc.date.available2021-09-30T09:17:56Z
dc.date.embargo9999-12-31
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2017
dc.source.beginpage115
dc.source.conferenceEnvironmental, Safety, and Health Issues in IC Production
dc.source.conferencedate4/12/1996
dc.source.conferencelocationBoston, MA USA
dc.source.endpage125
dc.title

Chlorine precursors for gate oxidation processes

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
1991.pdf
Size:
480.08 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions