Browsing by author "Kovacs, Frederic"
Now showing items 1-4 of 4
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Cleaning of metal gate stacks for the sub 90nm technology node
Snow, Jim; Kraus, Harald; Vermeyen, Kenneth; Fyen, Wim; Mertens, Paul; Kovacs, Frederic (2004) -
Cleaning of metal gate stacks for the sub 90nm technology node
Kraus, Harald; Vermeyen, Kenneth; Snow, Jim; Fyen, Wim; Mertens, Paul; Kovacs, Frederic (2003) -
Method for determining the effectiveness of silicon nitride as a barrier layer for HfO2
Kraus, Harald; Snow, Jim; Van Doorne, Patrick; Fyen, Wim; Mertens, Paul; Kovacs, Frederic (2004) -
Method for determining the effectiveness of silicon nitride as a barrier layer for HfO2
Kraus, Harald; Snow, Jim; Van Doorne, Patrick; Mertens, Paul; Kovacs, Frederic (2003)