Browsing by author "Chiou, T.-B."

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Development of automatic OPC treatment and layout decomposition for double dipole lithography for low K1-imaging

Chiou, T.-B.; Chen, A.; Hsu, Stephen D.; Eurlings, M.; Hendrickx, Eric (2005)
Line-end gap measurement with YieldStar scatterometer: towards an OPC model calibration

Charley, Anne-Laure; Leray, Philippe; Cheng, Shaunee; Dusa, Mircea; Chiou, T.-B.; Fumar-Pici, A. (2012)