Line-end gap measurement with YieldStar scatterometer: towards an OPC model calibration

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Authors
Charley, Anne-Laure; Leray, Philippe; Cheng, Shaunee; Dusa, Mircea; Chiou, T.-B.; Fumar-Pici, A.
Conference
Metrology, Inspection, and Process Control for Microlithography XXVI
Title
Line-end gap measurement with YieldStar scatterometer: towards an OPC model calibration
Publication type
Proceedings paper
Embargo date
9999-12-31
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