Browsing by author "Nealy, Paul F."

Now showing items 1-2 of 2

All track directed self-assembly of block copolymers: process flow and origin of defects

Rincon Delgadillo, Paulina; Gronheid, Roel; Thode, Christopher J.; Wu, Hengpeng; Cao, Yi; Somervell, Mark; Nafus, Kathleen; Nealy, Paul F. (2012)
Towards an all-track 300 mm process for direct self-assembly

Liu, Chi-Chun; Thode, Christopher J.; Rincon Delgadillo, Paulina; Craig, Gordon S.W.; Nealy, Paul F.; Gronheid, Roel (2011)