Browsing by author "Onandia, Laura"
Now showing items 1-2 of 2
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Influence of UV irradiation on the removal of post-etch photoresist in porous low-k dielectric patterning
Kesters, Els; Le, Quoc Toan; Lux, Marcel; Onandia, Laura; Baerts, Christina; Vereecke, Guy (2009) -
Influence of UV irradiation on the removal of post-etch photoresist in porous low-k dielectric patterning
Kesters, Els; Le, Quoc Toan; Lux, Marcel; Baerts, Christina; Onandia, Laura; Vereecke, Guy (2009)