Browsing by author "Veltens, J."
Now showing items 1-3 of 3
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Aging phenomena in the removal of nano-particles from Si wafers
Vereecke, Guy; Veltens, J.; Xu, Kaidong; Eitoku, A.; Sano, Ken-Ichi; Arnauts, Sophia; Kenis, Karine; Snow, J.; Vinckier, Chris; Mertens, Paul (2008) -
Cleaning uniformity of silicon wafers in megasonic tanks
Vereecke, Guy; Holsteyns, Frank; Veltens, J.; Vos, Rita; Mertens, Paul (2003) -
Evaluation of megasonic cleaning systems for particle removal efficiency and damaging
Vereecke, Guy; Holsteyns, Frank; Veltens, J.; Lux, Marcel; Arnauts, Sophia; Kenis, Karine; Vos, Rita; Mertens, Paul; Heyns, Marc (2003)