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Cleaning uniformity of silicon wafers in megasonic tanks
Publication:
Cleaning uniformity of silicon wafers in megasonic tanks
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Date
2003
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vereecke, Guy
;
Holsteyns, Frank
;
Veltens, J.
;
Vos, Rita
;
Mertens, Paul
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1903
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Acq. date: 2025-12-10
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Metrics
Views
1903
since deposited on 2021-10-15
1
last month
Acq. date: 2025-12-10
Citations