Publication:

Cleaning uniformity of silicon wafers in megasonic tanks

Date

2003
Presentation
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dc.contributor.authorVereecke, Guy
dc.contributor.authorHolsteyns, Frank
dc.contributor.authorVeltens, J.
dc.contributor.authorVos, Rita
dc.contributor.authorMertens, Paul
dc.contributor.imecauthorVereecke, Guy
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.imecauthorVos, Rita
dc.contributor.imecauthorMertens, Paul
dc.contributor.orcidimecVereecke, Guy::0000-0001-9058-9338
dc.date.accessioned2021-10-15T07:38:38Z
dc.date.available2021-10-15T07:38:38Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8365
dc.source.conferenceUltrasonics International
dc.source.conferencedate30/06/2003
dc.source.conferencelocationGranada Spain
dc.title

Cleaning uniformity of silicon wafers in megasonic tanks

dc.typeOral presentation
dspace.entity.typePublication
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