Browsing by author "Nguyen, Olivier"
Now showing items 1-3 of 3
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CMP of a RU based layer in an advanced Cu low-k stack
Vaes, Jan; Sinapi, Fabrice; Hernandez, Jose Luis; Santoro, Gaetano; Nguyen, Olivier; Wang, James (2007-10) -
Post-direct-CMP dielectric surface copper contamination: quantitative analysis and impact on dielectric breakdown behaviour
Heylen, Nancy; Li, Yunlong; Kellens, Kristof; Travaly, Youssef; Vereecke, Guy; Volders, Henny; Tokei, Zsolt; Versluijs, Janko; Rip, Jens; Van Besien, Els; Carbonell, Laure; Beyer, Gerald; Fischer, Paul; Zhao, Larry; Santoro, Gaetano; Cockburn, Andrew; Nguyen, Olivier (2009) -
Post-direct-CMP dielectric surface copper contamination: quantitative analysis and impact on dielectric breakdown behaviour
Heylen, Nancy; Li, Yunlong; Travaly, Youssef; Vereecke, Guy; Volders, Henny; Tokei, Zsolt; Versluijs, Janko; Rip, Jens; Beyer, Gerald; Fischer, Paul; Zhao, Larry; Santoro, Gaetano; Nguyen, Olivier; Cockburn, Andrew (2008)