CMP of a RU based layer in an advanced Cu low-k stack

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Authors
Vaes, Jan; Sinapi, Fabrice; Hernandez, Jose Luis; Santoro, Gaetano; Nguyen, Olivier; Wang, James
Conference
International Conference on Planarization CMP Technology - ICPT
Title
CMP of a RU based layer in an advanced Cu low-k stack
Publication type
Proceedings paper
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