Authors

Heylen, Nancy; Li, Yunlong; Travaly, Youssef; Vereecke, Guy; Volders, Henny; Tokei, Zsolt; Versluijs, Janko; Rip, Jens; Beyer, Gerald; Fischer, Paul; Zhao, Larry; Santoro, Gaetano; Nguyen, Olivier; Cockburn, Andrew

Conference

Advanced Metallization Conference - AMC

Title

Post-direct-CMP dielectric surface copper contamination: quantitative analysis and impact on dielectric breakdown behaviour

Publication type

Meeting abstract