Publication:
Post-direct-CMP dielectric surface copper contamination: quantitative analysis and impact on dielectric breakdown behaviour
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1929 since deposited on 2021-10-17
1last month
Acq. date: 2026-02-24
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Statistics
Views
1929 since deposited on 2021-10-17
1last month
Acq. date: 2026-02-24
Citations