Browsing by author "Geens, Veerle"
Now showing items 1-3 of 3
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A Ge matrix removal method for metallic contamination analysis on Ge wafers using TXRF
Hellin, David; Geens, Veerle; Teerlinck, Ivo; Rip, Jens; Theuwis, Antoon; De Gendt, Stefan; Vinckier, Chris (2004) -
Remediation for TXRF saturation effects on micro-droplet residues from preconcentration methods on semiconductor wafers
Hellin, David; Rip, Jens; Geens, Veerle; Delande, Tinne; Conard, Thierry; De Gendt, Stefan; Vinckier, Chris (2005) -
VPD-DC-TXRF for metallic contamination analysis of Ge wafers
Hellin, David; Geens, Veerle; Teerlinck, Ivo; Van Steenbergen, Jan; Raskin, Geoffroy; Mertens, Paul; De Gendt, Stefan; Vinckier, Chris (2004)