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VPD-DC-TXRF for metallic contamination analysis of Ge wafers
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VPD-DC-TXRF for metallic contamination analysis of Ge wafers
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Date
2004
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Hellin, David
;
Geens, Veerle
;
Teerlinck, Ivo
;
Van Steenbergen, Jan
;
Raskin, Geoffroy
;
Mertens, Paul
;
De Gendt, Stefan
;
Vinckier, Chris
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1929
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Acq. date: 2026-01-06
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Views
1929
since deposited on 2021-10-15
2
last month
2
last week
Acq. date: 2026-01-06
Citations