Browsing by author "Guyer, Eric"

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Effects of UV-cure on mechanical, physical and electrical properties of microporous SiOC:H dielectric films

Iacopi, Francesca; Waldfried, Carlo; Abell, Thomas; Guyer, Eric; Eyckens, Brenda; Travaly, Youssef; Sajavaara, Timo; Gage, David M.; Beyer, Gerald; Berry, Ivan; Dauskardt, Reinhold; Maex, Karen (2005)
UV-assisted curing: an effective technique for toughening of low-k organosilicate films

Iacopi, Francesca; Waldfried, Carlo; Houthoofd, Kristof; Guyer, Eric; Gage, David; Carlotti, Giovanni; Travaly, Youssef; Abell, Thomas; Escorcia, Orlando; Beyer, Gerald; Berry, Ivan; Dauskardt, Reinhold; Maex, Karen (2005)