Publication:
UV-assisted curing: an effective technique for toughening of low-k organosilicate films
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1994 since deposited on 2021-10-16
2last month
Acq. date: 2026-02-27
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Statistics
Views
1994 since deposited on 2021-10-16
2last month
Acq. date: 2026-02-27
Citations