Browsing by author "Eason, K."
Now showing items 1-4 of 4
-
In-line electrical characterization of furnace and plasma and plasma nitrided gate dielectric films
Eason, K.; Passefort, Sophie; Zhang, X.; Cubaynes, Florence; Schaekers, Marc (2002) -
In-line electrical metrology for high-k gate dielectrics deposited by atomic layer chemical vapour deposition
De Witte, Hilde; Maes, Jan; Passefort, S.; Besling, W.; Eason, K.; Young, E.; Rittersma, Chris; Heyns, Marc (2002-09) -
In-line electrical metrology for high-k gate dielectrics deposited by atomic layer CVD
De Witte, Hilde; Passefort, Sophie; Besling, Wim; Maes, Jos; Eason, K.; Young, Edward; Heyns, Marc (2002) -
In-line electrical metrology for high-k gate dielectrics deposited by atomic layer CVD
De Witte, Hilde; Passefort, Sophie; Besling, Wim; Maes, Jan; Eason, K.; Young, Edward; Rittersma, Chris; Heyns, Marc (2003)