Authors

De Witte, Hilde; Maes, Jan; Passefort, S.; Besling, W.; Eason, K.; Young, E.; Rittersma, Chris; Heyns, Marc

Issue

17

Journal

Semiconductor Fabtech

Title

In-line electrical metrology for high-k gate dielectrics deposited by atomic layer chemical vapour deposition

Publication type

Journal article

Embargo date

9999-12-31