Now showing items 1-2 of 2

    • Fabrication of MBE high-k MOSFETs in a standard CMOS flow 

      Pantisano, Luigi; Conard, Thierry; Schram, Tom; Deweerd, Wim; De Gendt, Stefan; Heyns, Marc; Rittersma, C.; Marchiori, C.; Sousa, M.; Fompeyrine, F.; Locquet, J.P. (2007)
    • Molecular beam epitaxy for advanced gate stack materials and processes 

      Locquet, Jean-Pierre; Marchiori, Chiara; Sousa, M.; Siegwart, H.; Caimi, D.; Fompeyrine, Jean; Pantisano, Luigi; Claes, Martine; Conard, Thierry; Demand, Marc; Deweerd, Wim; De Gendt, Stefan; Heyns, Marc; Houssa, Michel; Aoulaiche, Marc; Lujan, Guilherme; Ragnarsson, Lars-Ake; Rohr, Erika; Schram, Tom; Hooker, Jacob; Rittersma, Chris; Furukawa, Yukiko; Seo, J.W.; dimoulas, A. (2005)