Fabrication of MBE high-k MOSFETs in a standard CMOS flow

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Authors
Pantisano, Luigi; Conard, Thierry; Schram, Tom; Deweerd, Wim; De Gendt, Stefan; Heyns, Marc; Rittersma, C.; Marchiori, C.; Sousa, M.; Fompeyrine, F.; Locquet, J.P.
Book
Advanced Gate-Stacks for High-Mobility Semiconductors
Title
Fabrication of MBE high-k MOSFETs in a standard CMOS flow
Publication type
Book chapter
Embargo date
9999-12-31
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