Publication:

Fabrication of MBE high-k MOSFETs in a standard CMOS flow

Date

2007
Book Chapter
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dc.contributor.authorPantisano, Luigi
dc.contributor.authorConard, Thierry
dc.contributor.authorSchram, Tom
dc.contributor.authorDeweerd, Wim
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorHeyns, Marc
dc.contributor.authorRittersma, C.
dc.contributor.authorMarchiori, C.
dc.contributor.authorSousa, M.
dc.contributor.authorFompeyrine, F.
dc.contributor.authorLocquet, J.P.
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorSchram, Tom
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned2021-10-16T18:26:25Z
dc.date.available2021-10-16T18:26:25Z
dc.date.embargo9999-12-31
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12668
dc.source.beginpage364
dc.source.bookAdvanced Gate-Stacks for High-Mobility Semiconductors
dc.source.endpage374
dc.title

Fabrication of MBE high-k MOSFETs in a standard CMOS flow

dc.typeBook chapter
dspace.entity.typePublication
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