Browsing by author "Marcoen, Kristof"

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Atomic layer deposition of ruthenium thin films from (ethylbenzyl) (1-ethyl-1,4-cyclohexadienyl) Ru: process characteristics, surface chemistry, and film properties

Popovici, Mihaela Ioana; Groven, Benjamin; Marcoen, Kristof; Phung, Quan; Dutta, Shibesh; Swerts, Johan; Meersschaut, Johan; Van den Berg, Jaap; Franquet, Alexis; Moussa, Alain; Vanstreels, Kris; Lagrain, Pieter; Bender, Hugo; Jurczak, Gosia; Van Elshocht, Sven; Delabie, Annelies; Adelmann, Christoph (2017)
Impact of the starting surface on the film characteristics of thermal Ru ALD for metal-insulator-metal applications

Popovici, Mihaela Ioana; Delabie, Annelies; Adelmann, Christoph; Marcoen, Kristof; Groven, Benjamin; Swerts, Johan; Meersschaut, Johan; Franquet, Alexis; Redolfi, Augusto; Jurczak, Gosia; Van Elshocht, Sven (2014)