Publication:
Impact of the starting surface on the film characteristics of thermal Ru ALD for metal-insulator-metal applications
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1844 since deposited on 2021-10-22
4last month
Acq. date: 2026-05-19
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Statistics
Views
1844 since deposited on 2021-10-22
4last month
Acq. date: 2026-05-19
Citations