Repository logo Institutional repository
  • Communities & Collections
  • Scientific publicationsOpen knowledge
Search repository
High contrast
  1. Home
  2. Impact of the starting surface on the film characteristics of thermal Ru ALD for metal-insulator-metal applications
  3. Statistics

Statistics by Category

Reports

  • Most viewed
  • Most viewed per month
  • Top city views
  • File Visits
Item Views
Impact of the starting surface on the film characteristics of thermal Ru ALD for metal-insulator-metal applications 1342

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings