Browsing by author "Habib, Mohamed"

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EUV flare and proximity modeling and model-based correction

Zuniga, Christian D.; Habib, Mohamed; Word, James C.; Lorusso, Gian; Hendrickx, Eric; Baylav, Burak; Chalasani, Raghu; Lam, Michael (2011)
Flare in extreme ultraviolet lithography: metrology, out-of-band radiation, fractal point spread function, and flare map calibration

Lorusso, Gian; Van Roey, Frieda; Hendrickx, Eric; Fenger, Germain; Lam, Michael; Christian, Zuniga; Habib, Mohamed; Diab, Hesham; Word, James (2009)