Browsing by author "Naqvi, Bilal"
Now showing items 1-2 of 2
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Reaction Mechanisms and EB Patterning Evaluation of Sn-complex-side-chain Polymer Used for EUV Lithography
Takata, Yui; Muroya, Yusa; Kozawa, Takahiro; Enomoto, Satoshi; Naqvi, Bilal; De Simone, Danilo (2023) -
Reaction mechanisms of Sn-complex-side-chain polymer used for extreme ultraviolet lithography, studied by electron pulse radiolysis and & gamma;-radiolysis
Takata, Yui; Muroya, Yusa; Kozawa, Takahiro; Machida, Kohei; Enomoto, Satoshi; Naqvi, Bilal; De Simone, Danilo (2023)