EISBN
978-1-5106-6104-2
ISBN
978-1-5106-6103-5
ISSN
0277-786X
Conference
Conference on Advances in Patterning Materials and Processes XL
Journal
Proceedings of SPIE
Volume
12498
Title
Reaction Mechanisms and EB Patterning Evaluation of Sn-complex-side-chain Polymer Used for EUV Lithography
Publication type
Proceedings paper