Browsing by author "Naulleau, Patrick"
Now showing items 1-3 of 3
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Experimental verification of high-NA imaging simulations using SHARP
Davydova, Natalia; Liu, Fei; Benk, Markus; van Setten, Eelco; Bottiglieri, Gerardo; van Oosten, Anton; McNamara, John; Wiaux, Vincent; Franke, Joern-Holger; Goldberg, Kenneth; Nam, D. S.; Zekry, Joseph; Naulleau, Patrick; Fliervoet, Timon; Carpaij, Rene (2020) -
Need for LWR metrology standardization: the imec roughness protocol
Lorusso, Gian; Sutani, Takeyoshi; Rutigliani, Vito; Van Roey, Frieda; Moussa, Alan; Charley, Anne-Laure; Mack, Chris; Naulleau, Patrick; Perera, Chami; Constantoudis, Vassilios; Ikota, Masami; Ishimoto, Toru; Koshihara, Shunshuke (2018) -
The need for LWR metrology standardization: the imec roughness protocol
Lorusso, Gian; Sutani, Takeyoshi; Rutigliani, Vito; Van Roey, Frieda; Moussa, Alain; Charley, Anne-Laure; Mack, Chris; Naulleau, Patrick; Constantoudis, Vassilios; Ikota, Masami; Ishimoto, Toru; Koshihara, S (2018)