Need for LWR metrology standardization: the imec roughness protocol

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Authors

Lorusso, Gian; Sutani, Takeyoshi; Rutigliani, Vito; Van Roey, Frieda; Moussa, Alan; Charley, Anne-Laure; Mack, Chris; Naulleau, Patrick; Perera, Chami; Constantoudis, Vassilios; Ikota, Masami; Ishimoto, Toru; Koshihara, Shunshuke

ISSN

1932-5150

Journal

Journal of Micro/Nanolithography MEMS and MOEMS

Volume

17

Title

Need for LWR metrology standardization: the imec roughness protocol

Publication type

Journal article

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