Need for LWR metrology standardization: the imec roughness protocol

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Author(s)

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Sutani, Takeyoshi

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Rutigliani, Vito

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Van Roey, Frieda

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Charley, Anne-Laure

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Naulleau, Patrick

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Constantoudis, Vassilios

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Koshihara, Shunshuke

Journal

Journal of Micro/Nanolithography MEMS and MOEMS

Metrics

1985 since deposited on 2021-10-25

Acq. date: 2025-10-23