Browsing by author "Christiansen, S."

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Characteristics of low-k and ultralow-k PECVD deposited SiCOH films

Grill, A.; Patel, V.; Rodbell, K.P.; Huang, E.; Christiansen, S.; Baklanov, Mikhaïl (2002)
Strained silicon on wafer level by wafer bonding: materials processing, strain measurements and strain relaxation

Reiche, M.; Moutanabbir, O.; Himcinschi, C.; Christiansen, S.; Erfurth, E.; Goesele, U.; Mantl, S.; Buca, D.; Zhao, Q. T.; Loo, Roger; Nguyen, Duy; Muster, F.; Petzold, M. (2008)
Strained silicon-on-insulator : fabrication and characterization

Reiche, M.; Himcinschi, C.; Goesele, U.; Christiansen, S.; Mantl, S.; Buca, D.; Zhao, Q. T.; Feste, S.; Loo, Roger; Nguyen, Duy; Buchholtz, W.; Wei, A.; Horstmann, D.; Feijoo, D.; Storck, P. (2007)