Characteristics of low-k and ultralow-k PECVD deposited SiCOH films

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Authors
Grill, A.; Patel, V.; Rodbell, K.P.; Huang, E.; Christiansen, S.; Baklanov, Mikhaïl
Conference
Silicon Materials - Processing, Characterization, and Reliability
Title
Characteristics of low-k and ultralow-k PECVD deposited SiCOH films
Publication type
Proceedings paper
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