Publication:
Characteristics of low-k and ultralow-k PECVD deposited SiCOH films
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1948 since deposited on 2021-10-14
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Acq. date: 2026-07-18
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Statistics
Views
1948 since deposited on 2021-10-14
1last month
1last week
Acq. date: 2026-07-18
Citations