Publication:
Characteristics of low-k and ultralow-k PECVD deposited SiCOH films
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1945 since deposited on 2021-10-14
1last month
Acq. date: 2026-01-06
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Metrics
Views
1945 since deposited on 2021-10-14
1last month
Acq. date: 2026-01-06
Citations