Browsing by author "Vajda, Felim"

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Effect of 147nm photons on porous Organo-Silicon Glass materials and damage improvement by optimized Cu/low-k integration approaches

Zhang, Liping; de Marneffe, Jean-Francois; Lukaszewicz, Mikolaj; Barry-Porter, Stephen; Vajda, Felim; Sun, Yiting; Heyne, Markus; Baklanov, Mikhaïl; Rutiqlian, Vito (2014)
Vacuum ultra-violet damage and damage mitigation for plasma processing of highly porous organosilicate glass dielectrics

de Marneffe, Jean-Francois; Zhang, Liping; Heyne, Markus; Lukaszewicz, Mikolasj; Porter, Stephen Barry; Vajda, Felim; Rutigliani, Vito; Krishtab, Mikhail; Goodyear, Andy; Cooke, Mike; Verdonck, Patrick; Baklanov, Mikhaïl (2015)