Authors

Zhang, Liping; de Marneffe, Jean-Francois; Lukaszewicz, Mikolaj; Barry-Porter, Stephen; Vajda, Felim; Sun, Yiting; Heyne, Markus; Baklanov, Mikhaïl; Rutiqlian, Vito

Conference

AVS 61st International Symposium and Exhibition

Title

Effect of 147nm photons on porous Organo-Silicon Glass materials and damage improvement by optimized Cu/low-k integration approaches

Publication type

Meeting abstract