Browsing by author "Zagrebnov, Maxim"
Now showing items 1-6 of 6
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Analysis of plasma induced gate oxide damage in multi-level metal processing
Yuan, Xiao Jie; Van den Bosch, Geert; Lietaer, Nicolas; Zagrebnov, Maxim; Debusschere, Ingrid; Deferm, Ludo (1998) -
Formation of ultra-thin PtSi layers with a 2-step silicidation process
Donaton, R. A.; Jin, S.; Bender, Hugo; Zagrebnov, Maxim; Baert, Kris; Maex, Karen; Vantomme, Andre; Langouche, G. (1997) -
IR PTSI imagers with integrated microlenses
Zagrebnov, Maxim; Baert, Kris; Verbist, Agnes; Franssens, Ghislain; Dhoedt, Bart; Baers, R.; Moelans, I.; Baeke, A. (1996) -
New approaches for formation of ultra-thin PtSi layers for infrared applications
Alves Donaton, Ricardo; Jin, S.; Bender, Hugo; Zagrebnov, Maxim; Baert, Kris; Maex, Karen; Vantomme, Andre; Langouche, G. (1998) -
New approaches for formation of ultra-thin PtSi layers for infrared applications
Alves Donaton, Ricardo; Jin, S.; Bender, Hugo; Zagrebnov, Maxim; Baert, Kris; Maex, Karen; Vantomme, Andre; Langouche, G. (1998) -
The analysis of the limiting recombination mechanisms on high efficiency thin film cells grown with CVD epitaxy
Evrard, Olivier; Demesmaeker, Els; Vermeulen, Tom; Zagrebnov, Maxim; Caymax, Matty; Laureys, Wim; Poortmans, Jef; Nijs, Johan; Mertens, Robert (1995)