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Formation of ultra-thin PtSi layers with a 2-step silicidation process
Publication:
Formation of ultra-thin PtSi layers with a 2-step silicidation process
Date
1997
Journal article
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Donaton, R. A.
;
Jin, S.
;
Bender, Hugo
;
Zagrebnov, Maxim
;
Baert, Kris
;
Maex, Karen
;
Vantomme, Andre
;
Langouche, G.
Journal
Microelectronic Engineering
Abstract
Description
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1995
since deposited on 2021-09-30
Acq. date: 2025-10-23
Citations
Metrics
Views
1995
since deposited on 2021-09-30
Acq. date: 2025-10-23
Citations