Formation of ultra-thin PtSi layers with a 2-step silicidation process

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Authors
Donaton, R. A.; Jin, S.; Bender, Hugo; Zagrebnov, Maxim; Baert, Kris; Maex, Karen; Vantomme, Andre; Langouche, G.
Journal
Microelectronic Engineering
Volume
37/38
Title
Formation of ultra-thin PtSi layers with a 2-step silicidation process
Publication type
Journal article
Embargo date
9999-12-31
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