Publication:

Analysis of plasma induced gate oxide damage in multi-level metal processing

Date

1998

Proceedings Paper

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Files

2699.pdf 463.74 KB

Author(s)

;

Van den Bosch, Geert

;

Lietaer, Nicolas

;

Zagrebnov, Maxim

;

Debusschere, Ingrid

;

Metrics

1969 since deposited on 2021-10-01

Acq. date: 2026-01-07