Analysis of plasma induced gate oxide damage in multi-level metal processing

Thumbnail
View/open
Metadata
Show full item record
Authors
Yuan, Xiao Jie; Van den Bosch, Geert; Lietaer, Nicolas; Zagrebnov, Maxim; Debusschere, Ingrid; Deferm, Ludo
Conference
Proceedings 15th International VLSI Multilevel Interconnection Conference - VMIC
Title
Analysis of plasma induced gate oxide damage in multi-level metal processing
Publication type
Proceedings paper
Embargo date
9999-12-31
Collections