Browsing by author "Kubota, M."
Now showing items 1-4 of 4
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Cleaning of metal contamination
Mertens, Paul; Hurd, Trace; Gräf, D.; Meuris, Marc; Schmidt, Harald; Heyns, Marc; Kwakman, L.; Hendriks, M.; Kubota, M. (1994) -
Current status and addressing the challenges of Hf-based gate stack toward 45nm-LSTP application
Niwa, Masaaki; Mitsuhashi, Riichirou; Yamamoto, K.; Hayashi, S.; Harada, Yoshinao; Rothschild, Aude; Hoffmann, Thomas Y.; Kubicek, Stefan; De Gendt, Stefan; Heyns, Marc; Biesemans, Serge; Kubota, M. (2005-10) -
Ni-FUSI on high-k as a candidate for 65nm LSTP CMOS
Kubicek, Stefan; Veloso, Anabela; Kottantharayil, Anil; Hayashi, Shigenori; Yamamoto, Kazuhiko; Mitsuhashi, Riichirou; Kittl, Jorge; Lauwers, Anne; Horii, S.; Harada, Y.; Kubota, M.; Niwa, Masaaki; De Gendt, Stefan; Heyns, Marc; Jurczak, Gosia; Biesemans, Serge (2005-04) -
Prospect of Hf-based gate dielectric by PVD with FUSI gate for LSTP application
Niwa, Masaaki; Mitsuhashi, Riichirou; Yamamoto, Kazuhiko; Hayashi, S.; Harada, Y.; Kubota, M.; Rothschild, Aude; Hoffmann, Thomas Y.; Kubicek, Stefan; De Gendt, Stefan; Heyns, Marc; Biesemans, Serge (2005)