Authors

Niwa, Masaaki; Mitsuhashi, Riichirou; Yamamoto, K.; Hayashi, S.; Harada, Yoshinao; Rothschild, Aude; Hoffmann, Thomas Y.; Kubicek, Stefan; De Gendt, Stefan; Heyns, Marc; Biesemans, Serge; Kubota, M.

Conference

Extended Abstracts of the International Conference on Solid State Devices and Materials - SSDM

Title

Current status and addressing the challenges of Hf-based gate stack toward 45nm-LSTP application

Publication type

Proceedings paper