Publication:

Current status and addressing the challenges of Hf-based gate stack toward 45nm-LSTP application

Date

2005-10

Proceedings Paper

Simple item page Full metadata Statistics

Author(s)

;

Mitsuhashi, Riichirou

;

;

;

Harada, Yoshinao

;

Rothschild, Aude

;

Hoffmann, Thomas Y.

;

Kubicek, Stefan

;

De Gendt, Stefan

;

;

Biesemans, Serge

;

Metrics

1957 since deposited on 2021-10-16

Acq. date: 2026-01-07