Publication:

Current status and addressing the challenges of Hf-based gate stack toward 45nm-LSTP application

Date

2005-10

Proceedings Paper

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Author(s)

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Mitsuhashi, Riichirou

;

;

;

Harada, Yoshinao

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Rothschild, Aude

;

Hoffmann, Thomas Y.

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Kubicek, Stefan

;

De Gendt, Stefan

;

;

Biesemans, Serge

;

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Acq. date: 2026-04-05