Browsing by author "Sajavaara, Timo"
Now showing items 1-11 of 11
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ARIBA: a combined analysis set-up for high resolution RBS and TOF-ERDA for thin film analysis
Sajavaara, Timo; Brijs, Bert; Giangrandi, Simone; Arstila, Kai; Vantomme, Andre; Vandervorst, Wilfried (2004) -
Characterization of the growth of atomic layer deposited WNxCy films on various substrates
Martin Hoyas, Ana; Travaly, Youssef; Schuhmacher, Jorg; Sajavaara, Timo; Whelan, Caroline; Eyckens, Brenda; Richard, Olivier; Giangrandi,; Brijs, Bert; Jonas, A.M.; Vantomme, Andre; Vandervorst, Wilfried; Celis, Jean-Pierre; Maex, Karen (2005) -
Effects of UV-cure on mechanical, physical and electrical properties of microporous SiOC:H dielectric films
Iacopi, Francesca; Waldfried, Carlo; Abell, Thomas; Guyer, Eric; Eyckens, Brenda; Travaly, Youssef; Sajavaara, Timo; Gage, David M.; Beyer, Gerald; Berry, Ivan; Dauskardt, Reinhold; Maex, Karen (2005) -
Low-energy heavy-ion TOF-ERDA setup for quantitative depth profiling of thin films
Giangrandi, Simone; Sajavaara, Timo; Brijs, Bert; Arstila, Kai; Vantomme, Andre; Vandervorst, Wilfried (2008) -
Nanoprober as a tool for electrical measurements of nanostructures
Olanterae, Lauri; Arstila, Kai; Hantschel, Thomas; Palanne, Saku; Sajavaara, Timo (2010) -
Nanoscale etching of GaAs and InP in acidic H2O2 solution: a striking contrast in kinetics and surface chemistry
van Dorp, Dennis; Arnauts, Sophia; Laitinen, Mikko; Sajavaara, Timo; Meersschaut, Johan; Conard, Thierry; Holsteyns, Frank; Kelly, John (2018) -
Nanoscale etching of III-V semiconductors in acidic hydrogen peroxide solution: GaAs and InP, a striking contrast
van Dorp, Dennis; Arnauts, Sophia; Laitinnen, Mikko; Sajavaara, Timo; Meersschaut, Johan; Conard, Thierry; Kelly, John (2019) -
Particle-induced X-ray emission in the analysis of GeCu thin films and photoresists containing As impurities
Kayhko, Marko; Meersschaut, Johan; Sajavaara, Timo (2014) -
Pitfalls in heavy ion ERD measurements
Arstila, Kai; Sajavaara, Timo; Brijs, Bert (2004) -
Study of thermal stability of nickel silicide by x-ray reflectivity
Van Hove, Marleen; Travaly, Youssef; Sajavaara, Timo; Brijs, Bert; Vandervorst, Wilfried; Lauwers, Anne; Chamirian, Oxana; Kittl, Jorge; Jonas, Alain; Maex, Karen (2005) -
The analysis of ultra-thin films with HRBS-30
Brijs, Bert; Kimura, Kenji; Schiettekatte, Francois; Sajavaara, Timo; Vandervorst, Wilfried (2010)