Study of thermal stability of nickel silicide by x-ray reflectivity

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Authors

Van Hove, Marleen; Travaly, Youssef; Sajavaara, Timo; Brijs, Bert; Vandervorst, Wilfried; Lauwers, Anne; Chamirian, Oxana; Kittl, Jorge; Jonas, Alain; Maex, Karen

Issue

3_4

Journal

Microelectronic Engineering

Volume

82

Title

Study of thermal stability of nickel silicide by x-ray reflectivity

Publication type

Journal article

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