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Study of thermal stability of nickel silicide by x-ray reflectivity
Publication:
Study of thermal stability of nickel silicide by x-ray reflectivity
Date
2005
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Van Hove, Marleen
;
Travaly, Youssef
;
Sajavaara, Timo
;
Brijs, Bert
;
Vandervorst, Wilfried
;
Lauwers, Anne
;
Chamirian, Oxana
;
Kittl, Jorge
;
Jonas, Alain
;
Maex, Karen
Journal
Microelectronic Engineering
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1906
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations
Metrics
Views
1906
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations